Evaluation of a microplasma source based on a stripline split-ring resonator
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2013
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/22/5/055017